| Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
|---|---|---|---|---|---|
| 3 Oct 2017 | SERC | Institute of Microelectronics | MEMS Industry-Worth Etching to Fabricate Tapered Structures in SiO2 | Vladimir Bliznetsov, Bin Li, Jae Wung Lee, Huamao Lin | Journal of Micoelectromechanical Systems |