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9 Jun 2015
SERC
Institute of Microelectronics
A Robust Bilayer Cap in Thin Film Encapsulation for MEMS Device Application
Jaibir Sharma,
Jae-Wung Lee,
Srinivas Merugu,
Navab Singh
IEEE Transactions on Components, Packaging and Manufacturing Technology
15 May 2015
SERC
Institute of Microelectronics
Cavity-enhanced sacrificial layer micromachining for faster release of thin film encapsulated MEMS
Jae-Wung Lee,
Jaibir Sharma,
Margarita Sofia Narducci,
Srinivas Merugu,
Xiao Lin Zhang,
Singh Navab
Journal of Micromechanics and Microengineering
1 Aug 2014
SERC
Institute of Microelectronics
Robust Pop-Up Shape Encapsulation Using Dual-Sealing
Jae-Wung Lee,
Jaibir Sharma,
Srinivas Merugu,
Navab Singh
Journal of Microelectromechanical Systems
1 Oct 2013
SERC
Institute of Microelectronics
Nano Porous Gold as a Capping Layer for Thin Film Encapsulation
Jae-Wung Lee,
Wei-Shan Wang,
Jaibir Sharma,
Yu-Ching Lin,
Navab Singh
Journal of Microelectromechanical Systems
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