| Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
|---|---|---|---|---|---|
| 15 May 2015 | SERC | Institute of Microelectronics | Cavity-enhanced sacrificial layer micromachining for faster release of thin film encapsulated MEMS | Jae-Wung Lee, Jaibir Sharma, Margarita Sofia Narducci, Srinivas Merugu, Xiao Lin Zhang, Singh Navab | Journal of Micromechanics and Microengineering |