| Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
|---|---|---|---|---|---|
| 28 Feb 2014 | SERC | Institute of Microelectronics | Integration of AlN with molybdenum electrodes and sacrificial amorphous silicon release using XeF2 | Jaibir Sharma, Sanchitha Fernando, Wee Ming Tan | Journal of Micromechanics and Microengineering |